Characterization of plasma and emergent ion beam in a compact helicon source with permanent magnets

A compact helicon source with multi-component changeable magnetic system was studied to gain enhanced parameters of plasma and emergent ion beam. Alteration of the magnetic field configuration was found to be the main instrument for increasing the plasma density and ion beam current. The source effi...

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Bibliographic Details
Date:2007
Main Authors: Virko, Yu.V., Virko, V.F., Shamrai, K.P., Yakimenko, A.I.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2007
Series:Вопросы атомной науки и техники
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Online Access:http://dspace.nbuv.gov.ua/handle/123456789/110512
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Characterization of plasma and emergent ion beam in a compact helicon source with permanent magnets / Yu.V. Virko, V.F. Virko, K.P. Shamrai, A.I. Yakimenko // Вопросы атомной науки и техники. — 2007. — № 1. — С. 136-138. — Бібліогр.: 7 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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Summary:A compact helicon source with multi-component changeable magnetic system was studied to gain enhanced parameters of plasma and emergent ion beam. Alteration of the magnetic field configuration was found to be the main instrument for increasing the plasma density and ion beam current. The source efficiency was also critically dependent on the rf antenna position and Ar gas pressure. By optimizing these parameters, plasma outflow was greatly increased and the emergent ion beam of energy above 100 eV was produced.