Influence of secondary electron emission on the RF gas breakdown
The influence of the electron impact secondary electron emission on the RF gas breakdown has been researched experimentally and theoretically with use of particle-in-sell simulation. The experiments and simulations are conducted in the discharge chamber with asymmetric electrodes which is frequently...
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| Date: | 2013 |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2013
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/111947 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Influence of secondary electron emission on the RF gas breakdown / A.N. Dakhov, S.V. Dudin // Вопросы атомной науки и техники. — 2013. — № 4. — С. 149-154. — Бібліогр.: 22 назв. — англ. |