Determination of sp³ fraction in ta-C coating using XPS and Raman spectroscopy
The paper presents results of studies on the structure of tetrahedral amorphous carbon films (ta-C) with a thickness in the range from 20 to 280 nm, deposited using pulsed vacuum arc technique with an electromagnetic Venetian blind plasma filter. The results of the phase structure analysis, obta...
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| Datum: | 2016 |
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| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2016
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| Schriftenreihe: | Вопросы атомной науки и техники |
| Schlagworte: | |
| Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/115409 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Determination of sp³ fraction in ta-C coating using XPS and Raman spectroscopy / V. Zavaleyev, J. Walkowicz, M. Sawczak, M. Klein, D. Moszyński, R. Chodun, K. Zdunek // Вопросы атомной науки и техники. — 2016. — № 4. — С. 84-92. — Бібліогр.: 45 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| Zusammenfassung: | The paper presents results of studies on the structure of tetrahedral amorphous carbon films (ta-C) with a
thickness in the range from 20 to 280 nm, deposited using pulsed vacuum arc technique with an electromagnetic
Venetian blind plasma filter. The results of the phase structure analysis, obtained using visible Raman spectroscopy
and UV Raman spectroscopy methods, showed a strong dependence of the results on the presence, on the surface of
synthesized thin carbon films, even of a minimum number of microparticles. The presence of microparticles in the
deposited coatings strongly affects the accuracy of the measured data, used next for calculation the ID/IG, IT/IG ratios
and determination of the G-peak dispersion, for all coating thicknesses, which pointed to significant diversification
in sp³ -bonds content in deposited films. |
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