Determination of surface defects by using the wavefront scanner
The possibility of changes in the polarization state of the laser beam reflected from inhomogeneity with the refractive index gradient is theoretically shown, which allows separating the phase shifts related with relief inhomogeneities and local changes of the surface refractive index. Modificati...
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| Date: | 2010 |
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| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2010
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| Series: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/117744 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Determination of surface defects by using the wavefront scanner / N.S. Goloborodko, V.I. Grygoruk, V.N. Kurashov, D.V. Podanchuk, A.A. Goloborodko, M.M. Kotov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 1. — С. 65-69. — Бібліогр.: 10 назв. — англ. |