Polarization analysis of birefringence in uniaxially deformed silicon crystals

The birefringence induced by uniaxial compression in low-doped silicon crystals was investigated both theoretically and experimentally. The circular components of the Stokes vector in the transmission and reflectance radiation are measured as a function of external pressure by using the method ba...

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Datum:2007
Hauptverfasser: Berezhinsky, L.I., Berezhinsky, I.L., Pipa, V.I., Matyash, I.Ye., Serdega, B.K.
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Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2007
Schriftenreihe:Semiconductor Physics Quantum Electronics & Optoelectronics
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spelling irk-123456789-1177732017-05-27T03:06:05Z Polarization analysis of birefringence in uniaxially deformed silicon crystals Berezhinsky, L.I. Berezhinsky, I.L. Pipa, V.I. Matyash, I.Ye. Serdega, B.K. The birefringence induced by uniaxial compression in low-doped silicon crystals was investigated both theoretically and experimentally. The circular components of the Stokes vector in the transmission and reflectance radiation are measured as a function of external pressure by using the method based on the modulation of radiation polarization. The value of the Brewster constant was obtained for absorption (λ = 0.63 µm) and transparence (λ = 1.15 µm) regions. The obtained experimental data are in a good agreement with calculation results based on the anisotropy model of dielectric properties within the framework of the Hook law. Shown is the practical importance of the polarization analysis in researching anisotropy of dielectric properties of materials. 2007 Article Polarization analysis of birefringence in uniaxially deformed silicon crystals / L.I. Berezhinsky, I.L. Berezhinsky, V.I. Pipa, I.Ye. Matyash, B.K. Serdega // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2007. — Т. 10, № 1. — С. 49-54. — Бібліогр.: 12 назв. — англ. 1560-8034 PACS 78.20.Fm http://dspace.nbuv.gov.ua/handle/123456789/117773 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
description The birefringence induced by uniaxial compression in low-doped silicon crystals was investigated both theoretically and experimentally. The circular components of the Stokes vector in the transmission and reflectance radiation are measured as a function of external pressure by using the method based on the modulation of radiation polarization. The value of the Brewster constant was obtained for absorption (λ = 0.63 µm) and transparence (λ = 1.15 µm) regions. The obtained experimental data are in a good agreement with calculation results based on the anisotropy model of dielectric properties within the framework of the Hook law. Shown is the practical importance of the polarization analysis in researching anisotropy of dielectric properties of materials.
format Article
author Berezhinsky, L.I.
Berezhinsky, I.L.
Pipa, V.I.
Matyash, I.Ye.
Serdega, B.K.
spellingShingle Berezhinsky, L.I.
Berezhinsky, I.L.
Pipa, V.I.
Matyash, I.Ye.
Serdega, B.K.
Polarization analysis of birefringence in uniaxially deformed silicon crystals
Semiconductor Physics Quantum Electronics & Optoelectronics
author_facet Berezhinsky, L.I.
Berezhinsky, I.L.
Pipa, V.I.
Matyash, I.Ye.
Serdega, B.K.
author_sort Berezhinsky, L.I.
title Polarization analysis of birefringence in uniaxially deformed silicon crystals
title_short Polarization analysis of birefringence in uniaxially deformed silicon crystals
title_full Polarization analysis of birefringence in uniaxially deformed silicon crystals
title_fullStr Polarization analysis of birefringence in uniaxially deformed silicon crystals
title_full_unstemmed Polarization analysis of birefringence in uniaxially deformed silicon crystals
title_sort polarization analysis of birefringence in uniaxially deformed silicon crystals
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
publishDate 2007
url http://dspace.nbuv.gov.ua/handle/123456789/117773
citation_txt Polarization analysis of birefringence in uniaxially deformed silicon crystals / L.I. Berezhinsky, I.L. Berezhinsky, V.I. Pipa, I.Ye. Matyash, B.K. Serdega // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2007. — Т. 10, № 1. — С. 49-54. — Бібліогр.: 12 назв. — англ.
series Semiconductor Physics Quantum Electronics & Optoelectronics
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AT matyashiye polarizationanalysisofbirefringenceinuniaxiallydeformedsiliconcrystals
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fulltext Semiconductor Physics, Quantum Electronics & Optoelectronics, 2007. V. 10, N 1. P. 49-54. © 2007, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 49 PACS 78.20.Fm Polarization analysis of birefringence in uniaxially deformed silicon crystals L.I. Berezhinsky1, I.L. Berezhinsky2, V.I. Pipa1, I.Ye. Matyash1, B.K. Serdega1 1V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine 41, prospect Nauky, 03028 Kyiv, Ukraine Phone: (38 044) 525-5778, e-mail: serdega@isp.kiev.ua 2I. Frantsevich Institute for Problems of Materials Science, NAS of Ukraine 3, Krzhyzhanovsky str., 03142 Kyiv, Ukraine, e-mail: oleggrig@ipms.kiev.ua Abstract. The birefringence induced by uniaxial compression in low-doped silicon crystals was investigated both theoretically and experimentally. The circular components of the Stokes vector in the transmission and reflectance radiation are measured as a function of external pressure by using the method based on the modulation of radiation polarization. The value of the Brewster constant was obtained for absorption (λ = 0.63 µm) and transparence (λ = 1.15 µm) regions. The obtained experimental data are in a good agreement with calculation results based on the anisotropy model of dielectric properties within the framework of the Hook law. Shown is the practical importance of the polarization analysis in researching anisotropy of dielectric properties of materials. Keywords: induced birefringence, polarization analysis, the Stokes vector. Manuscript received 19.12.06; accepted for publication 26.03.07; published online 01.06.07. 1. Introduction Birefringence in isotropic materials induced by uniaxial compression results in the polarization effect named as photo-elastic [1]. Its essence is that the refractive index value in the direction of compression and perpendicularly to it is different. In this case, the propagation of a light wave in the normal direction to the deformation axis with the polarization directed at some angle to this axis can be considered as propagation of two orthogonally polarized waves with different velocities. The phase difference between these waves is observed at the output from medium [2] and can be expressed by the formula λϕ Lnn )(π2 || ⊥−=∆ , where ||n and ⊥n are the refractive indexes of material in parallel and perpendicular directions to the compression axis, respectively, L is the thickness of medium, λ is the light wavelength. The phase difference results in the fact that the linearly polarized light at the input into the medium becomes elliptically polarized at the output from it at any value of ∆ϕ excepting ∆ϕ = 0, π/2, π. To determine the polarization state of radiation in this case, the Stokes vector is very convenient quantity. The method of Stokes-polarimetry [3] is useful as components of the Stokes vector are directly measurable quantities. Stokes-vector components are especially easily measured by the method of modulation of radiation polarization. The polarization modulation (PM) method for electromagnetic radiation was first used in ellipsometry [4]. In the work [5], the PM method was successfully used to study optical anisotropy in solids and liquids. The PM method allows to observe the photoelastic effect not only in transmittance, as it was done up to now, but also in reflection. Moreover, in [6] it was shown that this method allows to separate elliptically polarized radiation into the components of the Stokes vector (circular and linear polarized components). In this work, the photoelastic effect in crystalline silicon is analyzed using the Stokes vector components, which were experimentally measured by the PM method. It is shown that such description of the photoelastic effect allows to easily simulate the influence of the external factors (pressure, temperature etc.) on optical parameters of crystals, to deal with theoretical calculations and to compare them with experimental results. The PM method allows register birefringence by two ways: (i) measuring the phase difference between orthogonal components of the linearly polarized Semiconductor Physics, Quantum Electronics & Optoelectronics, 2007. V. 10, N 1. P. 49-54. © 2007, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 50 radiation, and (ii) measuring the difference of reflection coefficients for s- and p-polarized waves. In this work, we shall follow the (i)-way, and so we shall consider the anisotropy of the photoelastic effect as phase anisotropy contrary to amplitude anisotropy observed by the reflection absorption spectroscopy (RAS) method [7]. 2. Theory As it is known, the polarization state of a light wave in a general case can be described by the Stokes vector: ],,,[ VUQIS = , (1) where I is the total intensity of light, Q is the intensity difference of light polarized across to axes, U is the intensity of light polarized at the 45° angle to the axes, and V is the intensity difference of light with right and left circular polarizations. The Stokes parameters are expressed through the components ⊥= EEx and ||EEy = of the electrical field of a light wave as [8] ,|||| ∗ ⊥⊥ ∗ += EEEEI ,|||| ∗ ⊥⊥ ∗ −= EEEEQ ,|||| ∗ ⊥ ∗ ⊥ += EEEEU (2) ).( |||| ∗ ⊥ ∗ ⊥ −= EEEEiV Let's consider a plate ( Lz ≤≤0 ) of uniaxial crystal in vacuum, with optical axis oriented along y axis. The permeability tensor of a crystal is defined by the components ⊥ε≡ε=ε zzxx and ||ε≡ε yy . Let the light wave with the frequency ω and amplitude )0,,( yx EE=E falls from vacuum in the direction of z axis onto the surface 0=z of a sample. When refracting in the crystal, ordinary and extraordinary waves arise, which are characterized by complex refractive indexes, accordingly. The oscillations of electric fields of these waves are mutually orthogonal and independent from each other. Therefore, reflection (and transmission) of the waves with amplitudes ixE and iyE occur independently. It is possible to use for each wave the reflection νr and transmittance νt coefficients, respectively, obtained in [2] for an isotropic plate with the refraction indexes νn~ ( ||,=⊥ν ): ν ν δ ν δ ν ν − − = i i er er r 12 2 12 1 )1( , 2 12 2 12 2 1 )1( ν ν δ δ ν ν ν − − = i i e er rt . (3) Here, cnL νν ω=δ ~2 and )~1()~1(12 ννν +−= nnr is the amplitude of reflection from a vacuum-crystal boundary. The vector amplitudes of the reflected and transmitted waves are expressed as yiyxixr ErEr eeE ||+= ⊥ , yiyxixt EtEt eeE ||+= ⊥ . (4) The complex refractive indexes νn~ are expressed through real indexes of refraction νn and absorption νχ as ννν χ+= inn~ . Under the uniaxial deformation of a crystal, the refractive index in the direction of pressure ( || ~n ) and in perpendicular (to it) direction ( ⊥n~ ) are changed by different ways. As a model approach, we assume that the components of the permeability tensor have a linear dependence on the pressure X : XaaX µ−ε=ε+ε=ε ⊥ 00|| , . (5) Here, 2 000 )( χ+=ε in , 0n and 0χ are the indexes of refraction and absorption in the absence of pressure, µ is the Poisson constant, aiaa ′′+′= is the complex parameter depending on the frequency of light. For the weak absorption ( 00 n<<χ ), from (5) in the linear approximation on X , we obtain ,10|| XCnn += ,20|| XC+χ=χ ,10 XCnn µ−=⊥ ,20 XCµ−χ=χ⊥ (6) where n⊥, χ⊥ and ||n , ||χ are the indexes of refraction and absorption in directions perpendicular and parallel with respect to the direction of compression, respectively; 01 2naC ′= , 2 0002 2)( nanaC χ′−′′= . Thus, in the case of absorbing crystal the dependence of its optical properties on uniaxial pressure is described by two parameters: 1C and 2C . The Brewster constant XnnC )( || ⊥−= is expressed through 1C as 1)1( CC µ+= . 3. Features of the experiment The circular component of the Stokes vector was measured in transmittance and reflection for Si crystal as a function of compressing effort. Measurements were carried out on the samples prepared from rather pure silicon single crystal with the concentration of impurities about 1013 cm–3. The type of crystal conductivity in our experiments was of no importance, as the contribution of electrons or holes to permeability, and hence to birefringence, is very small right up to the concentration of carriers about ~1017 cm–3 [9]. In the course of measurements, light fell onto the (010) plane of the sample. Uniaxial compression was applied along the crystallographic direction [100], which allowed to avoid transformation of a crystal into the biaxial one. To reduce down to a minimum the influence of superficial defects on results of measurements, the samples were treated using standard technology including chemical- dynamic polishing. The thickness of samples in the direction of light propagation was 0.3 and 1 сm. Their cross section was 0.8×1.0 сm2 that was stipulated by the type of the compressing device used. Semiconductor Physics, Quantum Electronics & Optoelectronics, 2007. V. 10, N 1. P. 49-54. © 2007, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 51 The optical scheme of the setup was performed as a Michelson interferometer and described in [5]. Its operation principle consists of the following. The linearly polarized radiation )0,,( yx EE=E (azimuth 45° relatively to the direction of pressure applied to the sample) falls on the splitter and is split by two beams with equal intensities. One of them is directed onto the anisotropic reflector R (quarter-wave plate) and another – on the sample normally to its surface. After reflection, both beams are reduced together and through the device analyzing polarization state are directed onto the photodiode. The block of the photoelastic modulator of polarization [4] and polarizer (Nicol prism) was used as an analyzing device. When the scheme operates in the “transmittance” mode the mirror is put behind the sample. The feature of this scheme is use of a polarization modulator. The latter is a dynamic phase plate that changes polarization of a transmitted light wave without changing its intensity. The action of the system of modulator-polarizer has been analyzed in the work [6] in detail. It was shown that, after passing through the modulator and connected with it polarizer (Nicol prism), radiation with elliptic polarization generates in the photodiode a signal containing two components that differ by their frequencies. The first component with the modulation frequency f corresponds to the intensity of a circular component of elliptically polarized radiation, and with the frequency 2f – to a linearly polarized component. Therefore, it is possible to fix the intensity of a circular or linear component simultaneously by using the appropriate selective recording device. It is very important to note that in this case the magnitude of the linearly polarized component is the sum of Q and U (two components of the Stokes vector) which are orientated at the angle of ±45° relatively to each other. So, it is possible to measure the Q and U components by registration of an azimuth and magnitude of I component of the Stokes vector. All these measurements were carried out at the room temperature. The He-Ne laser ЛГ-126 (λ = 0.63 µm and 1.15 µm) was used as a source of radiation. The pure Si crystals weakly absorb at the wavelength 1.15 µm (absorption coefficient is close to 10–1 сm–1) and strongly absorb at the wavelength 0.63 µm (absorption coefficient is 3·103 сm–1) [10]. The Ge photodiode was used as a photodetector, signal of which was registered using a lock-in selective amplifier. 4. Results and discussion Fig. 1 shows the comparison of calculated and experimentally observed circular component Vt of the Stokes vector for the thick sample (L = 1 cm) with weak light absorption. To estimate the parameters 1C and 2C , in the function )(XVt , we can neglect the weak dependence of reflection amplitudes 12νr on pressure. So, we can write ))(2exp() 2 sin()( || || 0 ⊥ ⊥ χ+χ λ π − δ−δ = LVXVt , (7) where 0V practically does not depend on pressure and ϕ=δ−δ ⊥ 2)( || . The cross-points of the function )(XVt with the x-axis correspond to the pressure mX , at which the phase difference ∆ϕ = mπ (m = 0, 1, 2, …). For 1=m , the Brewster constant is expressed through the pressure 1X as )2( 1LXC λ= . The constant 2C defines a reduction of oscillation amplitudes with an increase of pressure. The constant С2 = 1.3·10–7 bar–1 was determined from the experimental curve in Fig. 1 taking into account the attenuation of enveloping curve drawn around the oscillation function. The Brewster constant С = = 2.6·10–6 bar–1 (appropriate constant С1 = 2·10–6 bar–1) was determined from the same experimental curve in the point Х1, in which the amplitude of a signal is equal to zero, i.e. Vt = 0, and the phase difference ( ||δ – ⊥δ ) = = π (m = 1). The damping character of intensity of circular polarized component is explained by an increase of the absorption coefficient ||χ and decrease of the absorption coefficient ⊥χ with growing the pressure according to (6). In fact, it displays the action of birefringence and dichroism effects simultaneously. Using expressions (3)–(5), we have calculated all the components of the Stokes vector. The Stokes vector components as the function of pressure in transmittance are shown in Fig. 2. Let’s pay attention to the following fact: the total intensity weakly oscillates with a change Fig. 1. Vt component of transmitted light as a function of the uniaxial compression Х for the sample with the thickness L = 0.3 сm: dashed line – experiment, solid line – calculation by using (3)-(5) for the values: ω = 1.6·1015 Hz; n0 = 3.5; χ0 = 5·10–5. Semiconductor Physics, Quantum Electronics & Optoelectronics, 2007. V. 10, N 1. P. 49-54. © 2007, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 52 of pressure. At the same time, the oscillation of the It component is synchronous with oscillation of the linear component Qt. These oscillations are due to multibeam interference that inevitably occurs when using the parameters of silicon. Our calculation showed that these oscillations disappear, if the absorption index increases up to χ0 =2·10–4. The explanation of behaviour of the Ut and Vt components is not difficult, too. Let's remember that the Ut component characterizes a linear polarization of the electric field of the light wave with the azimuths ±45° relatively to the deformation direction. The incident light wave has just this polarization. The sample takes the form of a phase plate under compression, and accordingly with its properties, it transforms the incident linear polarized wave into the elliptically polarized one in a general case. Fig. 2 illustrates this situation. One can see that the Vt component grows at the expense of a decrease of the Ut component when the pressure increases. At the argument Х = 48 bars, the Ut component is zero and the Vt component achieves its peak value. It means that the light wave leaving the sample is completely circular polarized because the phase difference ϕ between orthogonal components of the linearly polarized radiation achieves π⁄2. The further increase of the pressure results in appearance of the Ut component again but with another sign. At the same time, the intensity of the Vt component decreases. At X = = 85 bars, Vt = 0 and the Ut component has its peak value. In this point, the phase difference ϕ = π, and the light wave leaving the sample has linear polarization but orthogonally to polarization of the incident wave. The further increase in pressure after the point X = 85 bars results in growth of the circular Vt component and decrease of the Ut component. However, the circular Vt component has another sign that means changing of the rotation direction. The same situation is observed at the point X = 176 bars and other appropriate points. Fig. 2. Components of the Stokes vector for transmitted light as a function of the uniaxial compression Х calculated using (3)-(5): 1 – It, 2 – Ut, 3 – Qt, 4 – Vt for the values: ω = 1.6·1015 Hz, n0 = = 3.5; L = 0.3 сm; χ0 = 5·10–5; C = 2.6·10-6 bar–1. It is unexpected that Qt components of the Stokes vector appear, i.e. the linearly polarized wave with the azimuth parallel to the optical axis of the sample (direc- tion of deformation), which is absent in the structure of initial radiation at Х = 0. The appearance of this component is undoubtedly connected with a combination of the Ut and Vt components, which takes place at the multiple reflection of radiation inside the sample. Appearance of the Qt component is a reverse process relatively to resolution of the elliptically polarized wave by linear and circular components, which are carried out by means of the used technique. It is confirmed by the fact that the Qt component is present when Vt ≠ 0 and Qt = 0 at Vt = 0 (excluding the first period). Moreover, the calculation showed and experiment confirmed that the Qt component disappears when the absorption coefficient or thickness of the sample increases, i.e. when multireflections are absent due to a complete damping of radiation along the sample. Let's note the important feature of the PM method in measurements of the photoelastic effect. The non- polarized component of a light flow is always present after passage through the modulator and polarizer, because these elements are not ideally perfect. Therefore, this component is a handicap in measure- ments of small anisotropy, because it will create a noise current in the photodiode. In the case of PM, this non- polarized component does not contribute to the modulated signal and consequently does not limit the sensitivity of the used selective amplifier. Thus, the range of measured signals (and hence measured anisotropy) can reach some orders as is shown in Fig. 3. It shows the first half of the period of an oscillation function for the circular component of the Stokes vector submitted in Fig. 2. The curve in Fig. 2 is bounded below by a noise of the measuring circuit and light source. Fig. 3. Experimental illustration for detectability of PM in relation to the value of compression obtained from the first half-period of the Vt oscillation function in Fig. 2. Semiconductor Physics, Quantum Electronics & Optoelectronics, 2007. V. 10, N 1. P. 49-54. © 2007, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 53 The investigations of induced birefringence in silicon was carried out earlier only in transmittance by means of the traditional optical-polarization schemes. So, it is interesting to compare the magnitude of this constant obtained earlier, for example in the work [11], where C = 1.95·10–6 bar–1, and that of our PM method. The value of the Brewster constant at λ = 1.15 µm determined in our experiments is С = 2.6·10–6 bar–1. Distinction with the result obtained in the work [11] is close to 30 %. The measurement of the photoelastic effect in reflection was carried out at λ = 1.15 µm (case of weak absorption) and λ = 0.63 µm (case of strong absorption). The effect of multireflection with participation of the sample back wall plays an important role in formation of the reflected wave in the first case, but is insignificant in the second case. Fig. 4 shows the results of calculations of· the I r , Ur , Qr , Vr components as a function of the pressure X for the case of weak absorption. As well as in transmittance, multibeam interference takes place in this case, and then all the components I r , Ur , Qr , Vr are the oscillation functions versus X. Notice that the optical path is increased twice at participation of a back wall in formation of the reflected wave. It means that, within the framework of the accepted model (6), in the same range of pressures the oscillation period for the reflected wave should decrease twice in comparison with the transmitted wave, as is observed in Fig. 4. The curve R = f(X) of the photoelastic effect in the case of strong light absorption (Fig. 5) essentially differs from that of the transmittance case. This difference is observed both in the shape and in absolute value. First of all, it is caused by the fact that the crystal thickness d forming a reflected wave (d = 1/α ≈ 3.3·10–4 сm for λ = 0.63 µm) is some orders less than the geometric crystal thickness of 0.3 mm. Hence, in this case, the phase difference ϕ = (2π⁄λ)∆(nL) between orthogonal components of a light wave should be L/2d times less than in the transmittance case at the same anisotropy of ∆n. The real situation is still more complex. For example, Fig. 5 shows the calculated and experimental curves of the Vr component of the Stokes vector. The analysis of the experimental curve has shown that this curve is not described by a sine function, as it is observed in transmittance, but rather it is some power function. Moreover, the value of the Brewster constant, at which the best coincidence of the experimental and calculated curves takes place, also differs from the meaning of that in the transparency region. This result is in a good agreement with those of the work [12], where by means of the Raman scattering in silicon shown is that the Brewster constant sharply grows when approaching to the absorption edge. 5. Conclusions The use of polarization analysis to study birefringence shows that the characteristics and peculiarities of the photoelastic effect are well displayed by two components of the Stokes vector, namely, Ut and Vt. However, the use of the circular component Vt for measurements of any specific quantities (for example, the Brewster constant or anisotropy value) represents the most optimum variant. It is explained by the fact that the function Vt(X) has linear dependence on the birefringence value, at least, for small meanings of the argument, and it can be measured within a wide range of signals. It is advantages of the Vt(X) function. As signals measured by standard devices have a noise level of 5-6 orders less than the maximal value of the Vt component, the sensitivity of the measuring PM-devices to the quantity of anisotropy is some orders higher than traditional optical-polarization methods. So, investi- gating anisotropy of refraction indexes is enough to be limited by such value of the product (n||–n⊥)L, until the function Vt = f(Х) has linear dependence, i.e. ϕ < π/2. Fig. 4. Components of the Stokes vector (1 – Ir, 2 – Ur, 3 – Qr, 4 – Vr) as a function of the uniaxial compression Х calculated using (3)-(5) for radiation reflected from the sample for the values: L =0 .3 cm; ω = 1 .6 ·10 1 5 Hz; n 0 = 3 .5 ; χ0 = 5 ·10–5; C = 2 .6 ·10–6 bar–1. Fig. 5. Vr component of the Stokes vector as a function of the uniaxial compression Х: dashed line – experiment, solid line – calculation by using (3)-(5) for the values: L = = 0.3 cm; ω = 3·1015 Hz; n0 = 3.8; χ0 = 3.5·10–3; C = = 4 ·10 – 6 ba r – 1 . Semiconductor Physics, Quantum Electronics & Optoelectronics, 2007. V. 10, N 1. P. 49-54. © 2007, V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 54 Concerning to reflection, the results obtained by means of the PM method testify that this method is very promising to investigate birefringence induced in opaque substances. The nonlinearity observed in the deforma- tion curve Vr = f(X) is a lack what reduces metrological importance of this effect. But this lack can be easily eliminated by application of calibration. References 1. M. Frokht, Photoelastisity (2 volumes) Vol. 1. ОGIZ, Moscow, 1948 (in Russian). 2. M. Born, E. Wolf, Principles of optics. Nauka, Moscow, 1970 (in Russian). 3. V.V. Mar’enko, B.H. Kolesnichenko, S.H. Saven- kov, The automated system for research of polarized structure of an optical field, scattered by the natural objects // Optics of atmosphere and ocean 6, p. 1460-1464 (1993) (in Russian). 4. S.N. Jasperson, S.E. Sahnatterly, An improved method for high reflectivity ellipsometry based on a new polarization modulation technique // Rev. Sci. Instr. 40 p. 761-767 (1969). 5. B.K. Serdega, Ye.F. Venger, Ye.V. Nikitenko, The thermoelasticity in Ge due to nonuniform distribution of doping impurity studied by light polarization modulation technique // Semiconductor Physics, Quantum Electronics & Optoelectronics 2, p. 153-156 (1999). 6. Ye.V. Nikitenko, B.K. Serdega, Features of use of the polarization modulator in the optical schema for research birefringence // Optoelectronics and Semiconductor Technics (Naukova Dumka, Kyiv) No 33, p. 102-108 (1998) (in Russian). 7. D.E. Aspnes, J.P. Harbison, A.A. Studna, and L.T. Florez, Application of reflectance difference spectroscopy to molecular-beam epitaxy growth of GaAs and AlAs // J. Vac. Sci. Technol. A6, p. 1327-1332 (1988). 8. А. Jerard, J.M. Berch, Introduction in matrix optics. Mir, Мoscow, 1978 (in Russian). 9. J. Schmidt-Tiedemann, Experimental evidence of birefringence by free carriers in semiconductors // Phys. Rev. Lett. 7, p. 372-374 (1961). 10. W.C. Dash, F. Newman, Intrinsic optical absorp- tion single-crystal Ge and Si at 77 and 300 K // Phys. Rev. 99, p. 1151-1155 (1955). 11. V.I. Nikitenko, G.P. Marninenko, Some photo- elastic properties of gallium arsenide and silicon // Fizika Tverd. Tela 7, p. 622-624 (1965) (in Russian). 12. M. Chandrasekhar, M.H. Grimsditch, M. Cardona, Piezobirefringence above the fundamental edge in Si // Phys. Rev. B18, p. 4301-4310 (1978).