Structural and optical properties of Zn₁₋xCoxO thin films prepared by RF reactive sputtering technique
We have reported the effect of Co doping on structural and optical properties of ZnO thin films prepared by the RF reactive sputtering technique. The composite targets were formed by mixing and pressing ZnO and CoO powders. The thin films were deposited on silica and glass substrates. The structu...
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Date: | 2014 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2014
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Series: | Semiconductor Physics Quantum Electronics & Optoelectronics |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/118411 |
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Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Cite this: | Structural and optical properties of Zn₁₋xCoxO thin films prepared by RF reactive sputtering technique / A.I. Savchuk, I.D. Stolyarchuk, I. Stefanuk, B. Cieniek, E. Sheregii // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2014. — Т. 17, № 4. — С. 353-357. — Бібліогр.: 31 назв. — англ. |