Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification
The modification of the surface structure of the hybrid coating TiN/Al₂O₃ with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal det...
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| Date: | 2013 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики конденсованих систем НАН України
2013
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| Series: | Condensed Matter Physics |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/120821 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification / A.D. Pogrebnjak, V.N. Borisyuk, A.A. Bagdasaryan // Condensed Matter Physics. — 2013. — Т. 16, № 3. — С. 33803:1-8 . — Бібліогр.: 21 назв. — англ. |