Vacuum arc plasma source with rectilinear filter for deposition of functional coatings
Design and operation principle of a novel vacuum-arc source of filtered erosive plasma are described. The macroparticles are removed from the plasma by transformation of radial plasma streams emitted by the cathode spot of the arc on the side surface of cylindrical cathode, into axial stream by mean...
Saved in:
| Date: | 2008 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2008
|
| Series: | Functional Materials |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/135355 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Vacuum arc plasma source with rectilinear filter for deposition of functional coatings // I.I. Aksenov, D.S. Aksyonov // Functional Materials. — 2008. — Т. 15, № 3. — С. 442-447. — Бібліогр.: 10 назв. — англ. |