Magnetron sputtered coatings of AlN-TiCrB₂ system
Wear and corrosion resistant coatings have been obtained by HF magnetron sputtering of an AlN-TiCrB₂ target (prepared by powder metallurgy technique) on Si, Al₂O₃ and GaAs single crystals. The coatings are characterized by ultra dispersed structure and a considerable high-temperature oxidation resis...
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| Date: | 2009 |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2009
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| Series: | Functional Materials |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/138944 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Magnetron sputtered coatings of AlN-TiCrB₂ system // A.D. Panasyuk, I.A. Podchernyaeva, I.P. Neshpor, W. Gawalek, V.N. Ivanov // Functional Materials. — 2009. — Т. 16, № 4. — С. 492-497. — Бібліогр.: 8 назв. — англ. |