Manufacturing technology, optical and spectral properties of nano-structurized thin ZnO films
Dependence of cathodoluminescence parameters on the annealing temperature and RF ion etching has been studied for nano-structurized thin zinc oxide films obtained by RF magnetron reactive sputtering. The film structure has been characterized by X-ray diffraction. Thermal annealing and RF ion etch...
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| Date: | 2005 |
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| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2005
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| Series: | Functional Materials |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/139319 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Manufacturing technology, optical and spectral properties of nano-structurized thin ZnO films / M.R. Panasyuk, B.I. Turko, V.B. Kapustianik, G.A. Lubochkova, V.P. Rudyk, A.P. Vas`kiv, V.M. Davydov // Functional Materials. — 2005. — Т. 12, № 4. — С. 746-749. — Бібліогр.: 23 назв. — англ. |