Manufacturing technology, optical and spectral properties of nano-structurized thin ZnO films

Manufacturing technology, optical and spectral properties of nano-structurized thin ZnO films

Dependence of cathodoluminescence parameters on the annealing temperature and RF ion etching has been studied for nano-structurized thin zinc oxide films obtained by RF magnetron reactive sputtering. The film structure has been characterized by X-ray diffraction. Thermal annealing and RF ion etch...

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Datum:2005
Hauptverfasser: Panasyuk, M.R., Turko, B.I., Kapustianik, V.B., Lubochkova, G.A., Rudyk, V.P., Vas`kiv, A.P., Davydov, V.M.
Format: Artikel
Sprache:English
Veröffentlicht: НТК «Інститут монокристалів» НАН України 2005
Schriftenreihe:Functional Materials
Online Zugang:http://dspace.nbuv.gov.ua/handle/123456789/139319
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Manufacturing technology, optical and spectral properties of nano-structurized thin ZnO films / M.R. Panasyuk, B.I. Turko, V.B. Kapustianik, G.A. Lubochkova, V.P. Rudyk, A.P. Vas`kiv, V.M. Davydov // Functional Materials. — 2005. — Т. 12, № 4. — С. 746-749. — Бібліогр.: 23 назв. — англ.

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