Features of special joints of grain boundaries in polysilicon films of equiaxial and dendritic structures
Comparative analysis of special grain boundary joints in polysilicon films with equiaxial and dendritic (undoped and phosphorus-doped) structure, prepared by low-pressure chemical vapor deposition, has been carried out using atomic force microscopy and transmission electron microscopy. The formation...
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| Date: | 2006 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2006
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| Series: | Functional Materials |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/144374 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Features of special joints of grain boundaries in polysilicon films of equiaxial and dendritic structures / N.G. Nakhodkin, N.P. Kulish, P.M. Lytvyn, T.V. Rodionova // Functional Materials. — 2006. — Т. 13, № 2. — С. 305-309. — Бібліогр.: 11 назв. — англ. |