Using of proton beam writing techniques for fabrication of micro difraction gratings
To obtain micrometric gratings with a high aspect ratio by lithographic technique, it is proposed to use a proton beam focused in a line and electromagnetic scanning in the transverse direction to irradiate the resistive material. Numerical modeling is carried out to optimize the parameters of the...
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| Date: | 2018 |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2018
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/147662 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Using of proton beam writing techniques for fabrication of micro difraction gratings / A.G. Ponomarev, S.V. Kolinko, V.A. Rebrov, V.N. Kolomiets, S.N. Kravchenko // Вопросы атомной науки и техники. — 2018. — № 4. — С. 285-288. — Бібліогр.: 13 назв. — англ. |