Simulation of nanoparticle deposition from plasmas on solid surface
In this paper a computer simulation of depositing nanoparticles from rarefied plasma on a solid substrate, which is at a floating potential, is carried out. In our model, we used the equation of cold hydrodynamics for ions, the equilibrium distribution of Boltzmann for electrons, and the particle...
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Date: | 2018 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2018
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Series: | Вопросы атомной науки и техники |
Subjects: | |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/149064 |
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Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Cite this: | Simulation of nanoparticle deposition from plasmas on solid surface / M.A. Bondar, O.Yu. Kravchenko // Вопросы атомной науки и техники. — 2018. — № 6. — С. 267-269. — Бібліогр.: 5 назв. — англ. |