Generator of low pressure volume plasma with plasma electron source
In the current paper the results of a study of a volumetric high-current low-pressure discharge with a plasma electron source are presented. The source was made on the basis of a hollow cathode with a gas-magnetron ignition of the discharge and an auxiliary arc discharge for the cathode heating...
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| Datum: | 2018 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2018
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| Schriftenreihe: | Вопросы атомной науки и техники |
| Schlagworte: | |
| Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/149073 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Generator of low pressure volume plasma with plasma electron source / V.A. Khomich, A.V. Ryabtsev, V.G. Nazarenko // Вопросы атомной науки и техники. — 2018. — № 6. — С. 308-311. — Бібліогр.: 11 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Zusammenfassung: | In the current paper the results of a study of a volumetric high-current low-pressure discharge with a plasma
electron source are presented. The source was made on the basis of a hollow cathode with a gas-magnetron ignition
of the discharge and an auxiliary arc discharge for the cathode heating up to thermionic emission temperature. The
gas-discharge plasma was generated at a working gas pressure 0.1...1 Pa and hade an electron concentration of
10¹⁰ ...(5×10¹¹) cm⁻³
in a volume of 0.1 m³. Also the volt-ampere characteristics, the ion current density distribution
in the working volume are presented for different discharge conditions. The plasma generator may be used in the
processes of ion-plasma technologies (oxidation, nitration in non-hydrogen media), as well as in energy-saving
technologies of combined ion-plasma processing of structural materials. An improved electron plasma source with a
hollow cathode will allow one to work in a wide range of discharge currents and also will be served for a large
operating life of devices. |
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