Magnetron discharge intensification for effective deposition of coatings from difficult spray metals
The work is devoted to improvement of magnetron discharge parameters based on a standard magnetron sputtering system (MSS) of the MAG-5 type with an additional anode magnetic trap for discharge electrons in the conditions of localization of the discharge zone in the gap between electrodes to prevent...
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| Date: | 2020 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2020
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/194663 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Magnetron discharge intensification for effective deposition of coatings from difficult spray metals / А.G. Chunadra, К.N. Sereda, I.K. Tarasov, Y.A. Vereshchaka // Problems of atomic science and tecnology. — 2020. — № 6. — С. 146-149. — Бібліогр.: 4 назв. — англ. |