Digital processing of optical emission spectra of magnetron sputtering plasma system
To solve the actual problem of the analysis of the sputtered particles radiation during coating deposition in a magnetron sputtering system, a digital technique was proposed for processing the emission spectra of the discharge plasma. A graphic OSA application has been created, which allows obtainin...
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| Date: | 2019 |
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| Main Authors: | , , , , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2019
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/194956 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Digital processing of optical emission spectra of magnetron sputtering plasma system / I.A. Afanasіeva, S.N. Afanasiev, N.A. Azarenkov, V.V. Bobkov, V.V. Gritsyna, Yu.E. Logachev, I.I. Okseniuk, A.A. Skrypnyk, D.I. Shevchenko, V.M. Chornous // Problems of atomic science and technology. — 2019. — № 2. — С. 164. — Бібліогр.: 7 назв. — англ. |
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