Thermalization and ionization of metal atoms of operating environment at a metal ion-sputtering source
Fast atoms sputtered on a hot metal surface were suggested for thermalization at a metal ion-sputtering source and for further desorption into a discharge with temperature, which is equal to the temperature of the surface. In the suggested construction of the source, atom thermalization process is r...
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| Date: | 2021 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2021
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/195655 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Thermalization and ionization of metal atoms in the operating environment at a metal ion-sputtering source / V.A. Baturin, P.A. Litvinov, S.A. Pustovoitov, O.Yu. Roenko // Problems of Atomic Science and Technology. — 2021. — № 6. — С. 99-102. — Бібліогр.: 6 назв. — англ. |