Non-destructive control of PVD coating surface defects
Nanostructured ZrN coatings were deposited by the vacuum arc method with partial separation of the plasma flow from macroparticles using a curvilinear magnetic filter. With the proposed deposition parameters, a ZrN coating with an fcc lattice and (111) texture is formed. Theoretical studies are carr...
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| Datum: | 2022 |
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| Hauptverfasser: | , , , , , , , |
| Format: | Artikel |
| Sprache: | English |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2022
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| Schriftenreihe: | Problems of Atomic Science and Technology |
| Schlagworte: | |
| Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/195907 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Non-destructive control of PVD coating surface defects / S.P. Romaniuk, M.S. Bilinska, A.V. Taran, O.Yu. Klochko, K. Nowakowska-Langier, A.K. Marchenko, E.S. Deryabkina, G.P. Nikolaychuk // Problems of Atomic Science and Technology. — 2022. — № 6. — С.139-142. — Бібліогр.: 15 назв. — англ. |