Modeling of information recording and selective etching processes in inorganic resists
Theoretical consideration and computer modeling of information pit recording and etching processes in chalcogenide vitreous semiconductors are proposed, namely we demonstrate how to record and develop information pits with the necessary shape and sizes in the inorganic resist using focused Gaussian...
Saved in:
| Date: | 2005 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут проблем реєстрації інформації НАН України
2005
|
| Series: | Реєстрація, зберігання і обробка даних |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/50773 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Modeling of information recording and selective etching processes in inorganic resists / A.N. Morozovska, S.A. Kostyukevych // Реєстрація, зберігання і оброб. даних. — 2005. — Т. 7, № 3. — С. 3-16. — Бібліогр.: 13 назв. — англ. |