RF discharge in argon with cylindrical dust particles
Kinetic computer simulations of the low pressure RF discharge in argon with cylindrical and spherical dust particles are carried out using PIC/MCC method. The Monte Carlo technique is used to describe electron and ion collisions with neutral atoms, ions, and dust particles. Obtained results show the...
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| Date: | 2005 |
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| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2005
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/79801 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | RF discharge in argon with cylindrical dust particles / Yu.I. Chutov, W.J. Goedheer, O.Yu. Kravchenko, G.I. Levada, T.E. Lisitchenko, R.O. Romanenko // Вопросы атомной науки и техники. — 2005. — № 2. — С. 194-196. — Бібліогр.: 5 назв. — англ. |