Resonant RF electromagnetic field input in the helicon plasma ion source
Spatial distribution of RF electromagnetic field absorption by a plasma electron subsystem of ion source is studied. An ion source operates in a helicon mode (wci < w < wce < wpe). A simplified model of plasma RF source is used for investigations. Calculations were performed for two particu...
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Date: | 2014 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2014
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Series: | Вопросы атомной науки и техники |
Subjects: | |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/80503 |
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Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Cite this: | Resonant RF electromagnetic field input in the helicon plasma ion source / O.V. Alexenko, V.I. Miroshnichenko, S.N. Mordik // Вопросы атомной науки и техники. — 2014. — № 5. — С. 153-160. — Бібліогр.: 10 назв. — англ. |