Synthesis of TiO₂ different phase by DC magnetron sputtering
The enhanced interest to synthesis of thin and extra-thin films using for surface materials modification continue to be quite actual up to now. A special attention is drawn to coatings having important for practical applications characteristics with costs-effective production. These may be the films...
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| Date: | 2014 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2014
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/81948 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Synthesis of TiO₂ different phase by DC magnetron sputtering / A. Dobrovolskiy, A. Goncharov, E. Kostin, E. Frolova // Вопросы атомной науки и техники. — 2014. — № 6. — С. 145-148. — Бібліогр.: 18 назв. — англ. |