Dynamic of wall currents in pulse plasma diode in tin vapor
In the paper the level of high-current pulse discharge plasma influence on the chamber wall is carried out, that is important for position choosing of the nanolithographer first collecting mirror with gas-discharge radiation source. In the high-current pulse discharge in tin vapor the dynamic of w...
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| Date: | 2011 |
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| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2011
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/90952 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Dynamic of wall currents in pulse plasma diode in tin vapor / A.F. Tseluyko, V.T. Lazurik, D.L. Ryabchikov, A. Hassanein, I.V. Borgun , I.N. Sereda, S.V. Borisko // Вопросы атомной науки и техники. — 2011. — № 1. — С. 143-145. — Бібліогр.: 2 назв. — англ. |