Application of pulse power supply for diamond coatings deposition in glow discharge plasma
Comparative studies of diamond coatings deposition have been carried out in the glow discharge plasma stabilized by a magnetic field in methane-hydrogen medium with using the DC or pulse power supply. It was shown that using of a pulsed power supply leads to an increase of the input power range at w...
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| Datum: | 2019 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2019
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| Schriftenreihe: | Вопросы атомной науки и техники |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Application of pulse power supply for diamond coatings deposition in glow discharge plasma / K.I. Koshevoy, Yu.Ya. Volkov, V.E. Strel’nitskij, E.N. Reshetnyak // Problems of atomic science and technology. — 2019. — № 1. — С. 197-200. — Бібліогр.: 10 назв. — англ. |
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