Basic plasma features of planar jet formed by capacitive RF discharge in atmosphere pressure argon
Upgraded method of determining basic parameters of weakly ionized plasma by means of photometric study of bremsstrahlung emission continuum in visible spectrum range is described. Time-averaged spatial distributions of electron temperature and density in planar plasma jet formed by capacitive RF dis...
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Date: | 2019 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2019
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Series: | Вопросы атомной науки и техники |
Subjects: | |
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Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Cite this: | Basic plasma features of planar jet formed by capacitive RF discharge in atmosphere pressure argon / V.Yu. Bazhenov, S.M. Gubarev, V.V. Tsiolko // Problems of atomic science and technology. — 2019. — № 4. — С. 155-158. — Бібліогр.: 10 назв. — англ. |