The structure peculiarities of semiconductor vibration-frequency sensors
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Date: | 1998 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Published: |
1998
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Series: | Technology and design in electronic equipment |
Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000455336 |
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Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |