Dissociative mode in low-pressure RF discharge

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Datum:	2006
1. Verfasser:	V. A. Lisovskij
Format:	Artikel
Sprache:	English
Veröffentlicht:	2006
Schriftenreihe:	Physical surface engineering
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0000855345
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Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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spelling	open-sciencenbuvgovua-1068422024-04-17T19:10:02Z Dissociative mode in low-pressure RF discharge V. A. Lisovskij 1999-8074 2006 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000855345 Article
institution	Library portal of National Academy of Sciences of Ukraine \| LibNAS
collection	Open-Science
language	English
series	Physical surface engineering
spellingShingle	Physical surface engineering V. A. Lisovskij Dissociative mode in low-pressure RF discharge
format	Article
author	V. A. Lisovskij
author_facet	V. A. Lisovskij
author_sort	V. A. Lisovskij
title	Dissociative mode in low-pressure RF discharge
title_short	Dissociative mode in low-pressure RF discharge
title_full	Dissociative mode in low-pressure RF discharge
title_fullStr	Dissociative mode in low-pressure RF discharge
title_full_unstemmed	Dissociative mode in low-pressure RF discharge
title_sort	dissociative mode in low-pressure rf discharge
publishDate	2006
url	http://jnas.nbuv.gov.ua/article/UJRN-0000855345
work_keys_str_mv	AT valisovskij dissociativemodeinlowpressurerfdischarge
first_indexed	2024-04-18T06:08:10Z
last_indexed	2024-04-18T06:08:10Z
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