Surface roughness of optoelectronic components in mechanical polishing

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Datum:	2018
1. Verfasser:	Ju. D. Filatov
Format:	Artikel
Sprache:	English
Veröffentlicht:	2018
Schriftenreihe:	Superhard Materials
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0000940147
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Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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spelling	open-sciencenbuvgovua-296962024-02-27T21:56:51Z Surface roughness of optoelectronic components in mechanical polishing Ju. D. Filatov 0203-3119 2018 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000940147 Article
institution	Library portal of National Academy of Sciences of Ukraine \| LibNAS
collection	Open-Science
language	English
series	Superhard Materials
spellingShingle	Superhard Materials Ju. D. Filatov Surface roughness of optoelectronic components in mechanical polishing
format	Article
author	Ju. D. Filatov
author_facet	Ju. D. Filatov
author_sort	Ju. D. Filatov
title	Surface roughness of optoelectronic components in mechanical polishing
title_short	Surface roughness of optoelectronic components in mechanical polishing
title_full	Surface roughness of optoelectronic components in mechanical polishing
title_fullStr	Surface roughness of optoelectronic components in mechanical polishing
title_full_unstemmed	Surface roughness of optoelectronic components in mechanical polishing
title_sort	surface roughness of optoelectronic components in mechanical polishing
publishDate	2018
url	http://jnas.nbuv.gov.ua/article/UJRN-0000940147
work_keys_str_mv	AT judfilatov surfaceroughnessofoptoelectroniccomponentsinmechanicalpolishing
first_indexed	2025-07-17T15:41:30Z
last_indexed	2025-07-17T15:41:30Z
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