Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
Saved in:
| Date: | 2017 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2017
|
| Series: | Ukrainian journal of physics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000703424 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNASBe the first to leave a comment!