Polishing of opto-electronic equipment elements from single-crystal silicon carbide
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| Datum: | 2015 |
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| Hauptverfasser: | , , , , , , , , , , |
| Format: | Artikel |
| Sprache: | English |
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2015
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| Schriftenreihe: | Superhard Materials |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000694060 |
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open-sciencenbuvgovua-652772024-04-16T13:16:54Z Polishing of opto-electronic equipment elements from single-crystal silicon carbide Ju. D. Filatov A. G. Vetrov V. I. Sidorko Ju. Filatov S. V. Kovalev V. D. Kurilovich M. A. Danilchenko T. A. Prikhna A. I. Borimskij A. M. Kutsaj V. G. Poltoratskij 0203-3119 2015 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000694060 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials Ju. D. Filatov A. G. Vetrov V. I. Sidorko Ju. Filatov S. V. Kovalev V. D. Kurilovich M. A. Danilchenko T. A. Prikhna A. I. Borimskij A. M. Kutsaj V. G. Poltoratskij Polishing of opto-electronic equipment elements from single-crystal silicon carbide |
| format |
Article |
| author |
Ju. D. Filatov A. G. Vetrov V. I. Sidorko Ju. Filatov S. V. Kovalev V. D. Kurilovich M. A. Danilchenko T. A. Prikhna A. I. Borimskij A. M. Kutsaj V. G. Poltoratskij |
| author_facet |
Ju. D. Filatov A. G. Vetrov V. I. Sidorko Ju. Filatov S. V. Kovalev V. D. Kurilovich M. A. Danilchenko T. A. Prikhna A. I. Borimskij A. M. Kutsaj V. G. Poltoratskij |
| author_sort |
Ju. D. Filatov |
| title |
Polishing of opto-electronic equipment elements from single-crystal silicon carbide |
| title_short |
Polishing of opto-electronic equipment elements from single-crystal silicon carbide |
| title_full |
Polishing of opto-electronic equipment elements from single-crystal silicon carbide |
| title_fullStr |
Polishing of opto-electronic equipment elements from single-crystal silicon carbide |
| title_full_unstemmed |
Polishing of opto-electronic equipment elements from single-crystal silicon carbide |
| title_sort |
polishing of opto-electronic equipment elements from single-crystal silicon carbide |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000694060 |
| work_keys_str_mv |
AT judfilatov polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide AT agvetrov polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide AT visidorko polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide AT jufilatov polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide AT svkovalev polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide AT vdkurilovich polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide AT madanilchenko polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide AT taprikhna polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide AT aiborimskij polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide AT amkutsaj polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide AT vgpoltoratskij polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide |
| first_indexed |
2024-04-17T04:44:14Z |
| last_indexed |
2024-04-17T04:44:14Z |
| _version_ |
1796884086861594624 |