Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

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Bibliographische Detailangaben
Datum:	2015
Hauptverfasser:	A. P. Shapovalov, I. V. Korotash, E. M. Rudenko, F. F. Sizov, D. S. Dubyna, L. S. Osipov, Yu. Polotskiy, Z. F. Tsybrii, A. A. Korchovyi
Format:	Artikel
Sprache:	English
Veröffentlicht:	2015
Schriftenreihe:	Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0000706494
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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