Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists

Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists

Saved in:
Bibliographic Details
Date:2015
Main Authors: V. A. Danko, M. L. Dmytruk, I. Z. Indutnyi, S. V. Mamykin, V. I. Mynko, P. M. Lytvyn, M. V. Lukaniuk, Ye. Shepeliavyi
Format: Article
Language:English
Published: 2015
Series:Optoelectronics and Semiconductor Technique
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001061487
Tags: Add Tag
No Tags, Be the first to tag this record!
Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-68460
record_format dspace
spelling open-sciencenbuvgovua-684602024-04-16T13:34:24Z Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists V. A. Danko M. L. Dmytruk I. Z. Indutnyi S. V. Mamykin V. I. Mynko P. M. Lytvyn M. V. Lukaniuk Ye. Shepeliavyi 2707-6806 2015 en Optoelectronics and Semiconductor Technique http://jnas.nbuv.gov.ua/article/UJRN-0001061487 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Optoelectronics and Semiconductor Technique
spellingShingle Optoelectronics and Semiconductor Technique
V. A. Danko
M. L. Dmytruk
I. Z. Indutnyi
S. V. Mamykin
V. I. Mynko
P. M. Lytvyn
M. V. Lukaniuk
Ye. Shepeliavyi
Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists
format Article
author V. A. Danko
M. L. Dmytruk
I. Z. Indutnyi
S. V. Mamykin
V. I. Mynko
P. M. Lytvyn
M. V. Lukaniuk
Ye. Shepeliavyi
author_facet V. A. Danko
M. L. Dmytruk
I. Z. Indutnyi
S. V. Mamykin
V. I. Mynko
P. M. Lytvyn
M. V. Lukaniuk
Ye. Shepeliavyi
author_sort V. A. Danko
title Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists
title_short Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists
title_full Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists
title_fullStr Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists
title_full_unstemmed Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists
title_sort formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists
publishDate 2015
url http://jnas.nbuv.gov.ua/article/UJRN-0001061487
work_keys_str_mv AT vadanko formationofsubmicronperiodicplasmonstructuresoflargeareabyusingtheinterferencelithographymethodwithvacuumphotoresists
AT mldmytruk formationofsubmicronperiodicplasmonstructuresoflargeareabyusingtheinterferencelithographymethodwithvacuumphotoresists
AT izindutnyi formationofsubmicronperiodicplasmonstructuresoflargeareabyusingtheinterferencelithographymethodwithvacuumphotoresists
AT svmamykin formationofsubmicronperiodicplasmonstructuresoflargeareabyusingtheinterferencelithographymethodwithvacuumphotoresists
AT vimynko formationofsubmicronperiodicplasmonstructuresoflargeareabyusingtheinterferencelithographymethodwithvacuumphotoresists
AT pmlytvyn formationofsubmicronperiodicplasmonstructuresoflargeareabyusingtheinterferencelithographymethodwithvacuumphotoresists
AT mvlukaniuk formationofsubmicronperiodicplasmonstructuresoflargeareabyusingtheinterferencelithographymethodwithvacuumphotoresists
AT yeshepeliavyi formationofsubmicronperiodicplasmonstructuresoflargeareabyusingtheinterferencelithographymethodwithvacuumphotoresists
first_indexed 2025-07-22T05:55:40Z
last_indexed 2025-07-22T05:55:40Z
_version_ 1838325798473302016

Similar Items