Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods
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| Datum: | 2013 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2013
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| Schriftenreihe: | Journal of mechanical engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000450102 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-84995 |
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open-sciencenbuvgovua-849952024-04-16T18:42:09Z Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods N. A. Vasilenko A. O. Vasilenko 0131-2928 2013 en Journal of mechanical engineering http://jnas.nbuv.gov.ua/article/UJRN-0000450102 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Journal of mechanical engineering |
| spellingShingle |
Journal of mechanical engineering N. A. Vasilenko A. O. Vasilenko Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| format |
Article |
| author |
N. A. Vasilenko A. O. Vasilenko |
| author_facet |
N. A. Vasilenko A. O. Vasilenko |
| author_sort |
N. A. Vasilenko |
| title |
Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| title_short |
Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| title_full |
Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| title_fullStr |
Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| title_full_unstemmed |
Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| title_sort |
comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| publishDate |
2013 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000450102 |
| work_keys_str_mv |
AT navasilenko comparisonofphysicochemicalpropertiesofnitridefilmsproducedbyvariousreactivesputteringmethods AT aovasilenko comparisonofphysicochemicalpropertiesofnitridefilmsproducedbyvariousreactivesputteringmethods |
| first_indexed |
2024-04-17T06:04:26Z |
| last_indexed |
2024-04-17T06:04:26Z |
| _version_ |
1796886147121545216 |