Роль олова у формуванні мікро- і наноструктури поверхні шаруватих плівок Si–Sn–Si

The methods of Raman spectroscopy, scanning electron microscopy, atomic force microscopy, and X-ray fluorescence microanalysis are used to study the influence of tin on the shape and sizes of micro- and nano-structures arising on the surface of layered Si–Sn–Si films, as well as on the formation of...

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Bibliographic Details
Date:2023
Main Authors: Neimash, V.B., Shepelyavyi, P.E., Nikolenko, A.S., Strelchuk, V.V., Chegel, V.I., Olkhovyk, I.V., Voronov, S.O.
Format: Article
Language:English
Ukrainian
Published: Publishing house "Academperiodika" 2023
Subjects:
Online Access:https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2022602
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Journal Title:Ukrainian Journal of Physics

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Ukrainian Journal of Physics