Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor

by Rudenko, E.M., Korotash, I.V., Polotskiy, D.Y., Osipov, L.S., Dyakin, M.V., Prikhna, T.A., Shapovalov, A.P.
Published 2015