Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor

von Rudenko, E.M., Korotash, I.V., Polotskiy, D.Y., Osipov, L.S., Dyakin, M.V., Prikhna, T.A., Shapovalov, A.P.
Veröffentlicht 2015

Сontrolling parameters determining technological properties of a helicon discharge system

von Semenyuk, V.F., Virko, V.F., Korotash, I.V., Osipov, L.S., Polotsky, D.Yu., Rudenko, E.M., Slobodyan, V.M., Shamrai, K.P.
Veröffentlicht 2013

Nitriding in a helicon discharge as a promising technique for changing the surface properties of steel parts

von Rudenko, E.M., Panarin, V.Ye., Kyrychok, P.O., Svavilnyi, M.Ye., Korotash, I.V., Palyukh, O.O., Polotskyi, D.Yu., Trishchuk, R.L.
Veröffentlicht 2019

Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

von Shapovalov, A.P., Korotash, I.V., Rudenko, E.M., Sizov, F.F., Dubyna, D.S., Osipov, L.S., Polotskiy, D.Yu., Tsybrii, Z.F., Korchovyi, A.A.
Veröffentlicht 2015

Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

von Shapovalov, A.P., Korotash, I.V., Rudenko, E.M., Sizov, F.F., Dubyna, D.S., Osipov, L.S., Polotskiy, D.Yu., Tsybri, Z.F., Korchovyi, A.A.
Veröffentlicht 2015