The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma

von V. V. Vasilev, A. A. Luchaninov, E. N. Reshetnjak, V. E. Strelnitskij, G. N. Tolmacheva, G. A. Pribytkov, A. V. Gurskikh, M. G. Krinitsyn
Veröffentlicht 2015