The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma

by V. V. Vasilev, A. A. Luchaninov, E. N. Reshetnjak, V. E. Strelnitskij, G. N. Tolmacheva, G. A. Pribytkov, A. V. Gurskikh, M. G. Krinitsyn
Published 2015