Formation stages of pulsed discharge in oxygen and carbon tetrafluoride
This paper reports the current and voltage oscilloscope waveforms of a pulsed discharge measured in a broad range of frequencies (from 20 to 300 kHz) and duty cycle from 0.15 to 0.85 for two values of oxygen and carbon tetrafluoride pressure values of 0.1 and 1 Torr. Current oscilloscope waveforms o...
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| Datum: | 2016 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
Науковий фізико-технологічний центр МОН та НАН України
2016
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| Schriftenreihe: | Журнал физики и инженерии поверхности |
| Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/117057 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Formation stages of pulsed discharge in oxygen and carbon tetrafluoride / V.A. Lisovskiy, P.A. Ogloblina, S.V. Dudin, V.D. Yegorenkov, A.N. Dakhov, V.I. Farenik // Журнал физики и инженерии поверхности. — 2016. — Т. 1, № 4. — С. 351-360. — Бібліогр.: 26 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| Zusammenfassung: | This paper reports the current and voltage oscilloscope waveforms of a pulsed discharge measured in a broad range of frequencies (from 20 to 300 kHz) and duty cycle from 0.15 to 0.85 for two values of oxygen and carbon tetrafluoride pressure values of 0.1 and 1 Torr. Current oscilloscope waveforms of the glow pulsed discharge have been found to possess a plasma phase and an afterglow phase. The following stages of the plasma phase have been observed: 1. The capacitive current pulse of about 0.5–1 μs in duration; 2. The current growth stage the duration of which depends on the gas species, the plasma phase duration and the pressure; 3. The plateau (remarkably pronounced only for carbon tetrafluoride and absent for other gases); 4. The current decrease of tens microseconds in duration down to the level corresponding to that of the direct voltage discharge. |
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