Formation stages of pulsed discharge in oxygen and carbon tetrafluoride
This paper reports the current and voltage oscilloscope waveforms of a pulsed discharge measured in a broad range of frequencies (from 20 to 300 kHz) and duty cycle from 0.15 to 0.85 for two values of oxygen and carbon tetrafluoride pressure values of 0.1 and 1 Torr. Current oscilloscope waveforms o...
Saved in:
| Date: | 2016 |
|---|---|
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Науковий фізико-технологічний центр МОН та НАН України
2016
|
| Series: | Журнал физики и инженерии поверхности |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/117057 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Formation stages of pulsed discharge in oxygen and carbon tetrafluoride / V.A. Lisovskiy, P.A. Ogloblina, S.V. Dudin, V.D. Yegorenkov, A.N. Dakhov, V.I. Farenik // Журнал физики и инженерии поверхности. — 2016. — Т. 1, № 4. — С. 351-360. — Бібліогр.: 26 назв. — англ. |