Vacuum arc plasma source with rectilinear filter for deposition of functional coatings
Design and operation principle of a novel vacuum-arc source of filtered erosive plasma are described. The macroparticles are removed from the plasma by transformation of radial plasma streams emitted by the cathode spot of the arc on the side surface of cylindrical cathode, into axial stream by mean...
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| Datum: | 2008 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
НТК «Інститут монокристалів» НАН України
2008
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| Schriftenreihe: | Functional Materials |
| Schlagworte: | |
| Online Zugang: | http://dspace.nbuv.gov.ua/handle/123456789/135355 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Vacuum arc plasma source with rectilinear filter for deposition of functional coatings // I.I. Aksenov, D.S. Aksyonov // Functional Materials. — 2008. — Т. 15, № 3. — С. 442-447. — Бібліогр.: 10 назв. — англ. |