Influence of traps in gate oxide-Si film transition layers on FD MOSFET's characteristics at cryogenic emperatures
The results of experiments on the influence of recharging the electron traps in a Si-SiO₂ transition layer on the low-temperature characteristics of fully depleted silicon in insulator MOSFET devices are presented. It is shown that the low-dose gammaradiation improves electrophysical parameters o...
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Datum: | 2007 |
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Hauptverfasser: | Lysenko, V.S., Tyagulsky, I.P., Osiyuk, I.N., Nazarov, A.N. |
Format: | Artikel |
Sprache: | English |
Veröffentlicht: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2007
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Schriftenreihe: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
Zitieren: | Influence of traps in gate oxide-Si film transition layers on FD MOSFET's characteristics at cryogenic emperatures / V.S. Lysenko, I.P. Tyagulsky, I.N. Osiyuk, A.N. Nazarov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2007. — Т. 10, № 2. — С. 34-39. — Бібліогр.: 7 назв. — англ. |
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