Precision shaping flat surfaces details of optics and microelectronics when polishing
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| Datum: | 2016 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2016
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| Schriftenreihe: | Tooling materials science |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000713088 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
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open-sciencenbuvgovua-521392024-02-29T13:04:49Z Precision shaping flat surfaces details of optics and microelectronics when polishing Ju. D. Filatov V. I. Sidorko S. V. Kovalev V. A. Kovalev Ja. Jurchishin A. G. Vetrov 2223-3938 2016 en Tooling materials science http://jnas.nbuv.gov.ua/article/UJRN-0000713088 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Tooling materials science |
| spellingShingle |
Tooling materials science Ju. D. Filatov V. I. Sidorko S. V. Kovalev V. A. Kovalev Ja. Jurchishin A. G. Vetrov Precision shaping flat surfaces details of optics and microelectronics when polishing |
| format |
Article |
| author |
Ju. D. Filatov V. I. Sidorko S. V. Kovalev V. A. Kovalev Ja. Jurchishin A. G. Vetrov |
| author_facet |
Ju. D. Filatov V. I. Sidorko S. V. Kovalev V. A. Kovalev Ja. Jurchishin A. G. Vetrov |
| author_sort |
Ju. D. Filatov |
| title |
Precision shaping flat surfaces details of optics and microelectronics when polishing |
| title_short |
Precision shaping flat surfaces details of optics and microelectronics when polishing |
| title_full |
Precision shaping flat surfaces details of optics and microelectronics when polishing |
| title_fullStr |
Precision shaping flat surfaces details of optics and microelectronics when polishing |
| title_full_unstemmed |
Precision shaping flat surfaces details of optics and microelectronics when polishing |
| title_sort |
precision shaping flat surfaces details of optics and microelectronics when polishing |
| publishDate |
2016 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000713088 |
| work_keys_str_mv |
AT judfilatov precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing AT visidorko precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing AT svkovalev precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing AT vakovalev precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing AT jajurchishin precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing AT agvetrov precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing |
| first_indexed |
2025-07-17T22:57:41Z |
| last_indexed |
2025-07-17T22:57:41Z |
| _version_ |
1837937108045529088 |