Precision shaping flat surfaces details of optics and microelectronics when polishing

Precision shaping flat surfaces details of optics and microelectronics when polishing

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Bibliographic Details
Date:2016
Main Authors: Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov
Format: Article
Language:English
Published: 2016
Series:Tooling materials science
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000713088
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-52139
record_format dspace
spelling open-sciencenbuvgovua-521392024-02-29T13:04:49Z Precision shaping flat surfaces details of optics and microelectronics when polishing Ju. D. Filatov V. I. Sidorko S. V. Kovalev V. A. Kovalev Ja. Jurchishin A. G. Vetrov 2223-3938 2016 en Tooling materials science http://jnas.nbuv.gov.ua/article/UJRN-0000713088 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Tooling materials science
spellingShingle Tooling materials science
Ju. D. Filatov
V. I. Sidorko
S. V. Kovalev
V. A. Kovalev
Ja. Jurchishin
A. G. Vetrov
Precision shaping flat surfaces details of optics and microelectronics when polishing
format Article
author Ju. D. Filatov
V. I. Sidorko
S. V. Kovalev
V. A. Kovalev
Ja. Jurchishin
A. G. Vetrov
author_facet Ju. D. Filatov
V. I. Sidorko
S. V. Kovalev
V. A. Kovalev
Ja. Jurchishin
A. G. Vetrov
author_sort Ju. D. Filatov
title Precision shaping flat surfaces details of optics and microelectronics when polishing
title_short Precision shaping flat surfaces details of optics and microelectronics when polishing
title_full Precision shaping flat surfaces details of optics and microelectronics when polishing
title_fullStr Precision shaping flat surfaces details of optics and microelectronics when polishing
title_full_unstemmed Precision shaping flat surfaces details of optics and microelectronics when polishing
title_sort precision shaping flat surfaces details of optics and microelectronics when polishing
publishDate 2016
url http://jnas.nbuv.gov.ua/article/UJRN-0000713088
work_keys_str_mv AT judfilatov precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing
AT visidorko precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing
AT svkovalev precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing
AT vakovalev precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing
AT jajurchishin precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing
AT agvetrov precisionshapingflatsurfacesdetailsofopticsandmicroelectronicswhenpolishing
first_indexed 2025-07-17T22:57:41Z
last_indexed 2025-07-17T22:57:41Z
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