Polishing of opto-electronic equipment elements from single-crystal silicon carbide

Polishing of opto-electronic equipment elements from single-crystal silicon carbide

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Bibliographic Details
Date:2015
Main Authors: Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij
Format: Article
Language:English
Published: 2015
Series:Superhard Materials
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000694060
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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-65277
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spelling open-sciencenbuvgovua-652772024-04-16T13:16:54Z Polishing of opto-electronic equipment elements from single-crystal silicon carbide Ju. D. Filatov A. G. Vetrov V. I. Sidorko Ju. Filatov S. V. Kovalev V. D. Kurilovich M. A. Danilchenko T. A. Prikhna A. I. Borimskij A. M. Kutsaj V. G. Poltoratskij 0203-3119 2015 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000694060 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
Ju. D. Filatov
A. G. Vetrov
V. I. Sidorko
Ju. Filatov
S. V. Kovalev
V. D. Kurilovich
M. A. Danilchenko
T. A. Prikhna
A. I. Borimskij
A. M. Kutsaj
V. G. Poltoratskij
Polishing of opto-electronic equipment elements from single-crystal silicon carbide
format Article
author Ju. D. Filatov
A. G. Vetrov
V. I. Sidorko
Ju. Filatov
S. V. Kovalev
V. D. Kurilovich
M. A. Danilchenko
T. A. Prikhna
A. I. Borimskij
A. M. Kutsaj
V. G. Poltoratskij
author_facet Ju. D. Filatov
A. G. Vetrov
V. I. Sidorko
Ju. Filatov
S. V. Kovalev
V. D. Kurilovich
M. A. Danilchenko
T. A. Prikhna
A. I. Borimskij
A. M. Kutsaj
V. G. Poltoratskij
author_sort Ju. D. Filatov
title Polishing of opto-electronic equipment elements from single-crystal silicon carbide
title_short Polishing of opto-electronic equipment elements from single-crystal silicon carbide
title_full Polishing of opto-electronic equipment elements from single-crystal silicon carbide
title_fullStr Polishing of opto-electronic equipment elements from single-crystal silicon carbide
title_full_unstemmed Polishing of opto-electronic equipment elements from single-crystal silicon carbide
title_sort polishing of opto-electronic equipment elements from single-crystal silicon carbide
publishDate 2015
url http://jnas.nbuv.gov.ua/article/UJRN-0000694060
work_keys_str_mv AT judfilatov polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide
AT agvetrov polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide
AT visidorko polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide
AT jufilatov polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide
AT svkovalev polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide
AT vdkurilovich polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide
AT madanilchenko polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide
AT taprikhna polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide
AT aiborimskij polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide
AT amkutsaj polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide
AT vgpoltoratskij polishingofoptoelectronicequipmentelementsfromsinglecrystalsiliconcarbide
first_indexed 2024-04-17T04:44:14Z
last_indexed 2024-04-17T04:44:14Z
_version_ 1796884086861594624

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