Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering

Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering

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Bibliographic Details
Date:2015
Main Authors: A. O. Kozak, V. I. Ivashchenko, O. K. Porada, L. A. Ivashchenko, O. K. Synelnychenko, S. M. Dub, O. S. Lytvyn, I. I. Tymofieieva, H. M. Tolmacheva
Format: Article
Language:English
Published: 2015
Series:Superhard Materials
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000694123
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spelling open-sciencenbuvgovua-653082024-04-16T13:17:18Z Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering A. O. Kozak V. I. Ivashchenko O. K. Porada L. A. Ivashchenko O. K. Synelnychenko S. M. Dub O. S. Lytvyn I. I. Tymofieieva H. M. Tolmacheva 0203-3119 2015 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000694123 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
A. O. Kozak
V. I. Ivashchenko
O. K. Porada
L. A. Ivashchenko
O. K. Synelnychenko
S. M. Dub
O. S. Lytvyn
I. I. Tymofieieva
H. M. Tolmacheva
Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering
format Article
author A. O. Kozak
V. I. Ivashchenko
O. K. Porada
L. A. Ivashchenko
O. K. Synelnychenko
S. M. Dub
O. S. Lytvyn
I. I. Tymofieieva
H. M. Tolmacheva
author_facet A. O. Kozak
V. I. Ivashchenko
O. K. Porada
L. A. Ivashchenko
O. K. Synelnychenko
S. M. Dub
O. S. Lytvyn
I. I. Tymofieieva
H. M. Tolmacheva
author_sort A. O. Kozak
title Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering
title_short Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering
title_full Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering
title_fullStr Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering
title_full_unstemmed Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering
title_sort effect of the nitrogen flow on the properties of si–c–n amorphous thin films produced by magnetron sputtering
publishDate 2015
url http://jnas.nbuv.gov.ua/article/UJRN-0000694123
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AT laivashchenko effectofthenitrogenflowonthepropertiesofsicnamorphousthinfilmsproducedbymagnetronsputtering
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first_indexed 2025-07-22T04:56:57Z
last_indexed 2025-07-22T04:56:57Z
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