Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering
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| Datum: | 2015 |
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| Hauptverfasser: | , , , , , , , , |
| Format: | Artikel |
| Sprache: | English |
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2015
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| Schriftenreihe: | Superhard Materials |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000694123 |
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open-sciencenbuvgovua-653082024-04-16T13:17:18Z Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering A. O. Kozak V. I. Ivashchenko O. K. Porada L. A. Ivashchenko O. K. Synelnychenko S. M. Dub O. S. Lytvyn I. I. Tymofieieva H. M. Tolmacheva 0203-3119 2015 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000694123 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials A. O. Kozak V. I. Ivashchenko O. K. Porada L. A. Ivashchenko O. K. Synelnychenko S. M. Dub O. S. Lytvyn I. I. Tymofieieva H. M. Tolmacheva Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| format |
Article |
| author |
A. O. Kozak V. I. Ivashchenko O. K. Porada L. A. Ivashchenko O. K. Synelnychenko S. M. Dub O. S. Lytvyn I. I. Tymofieieva H. M. Tolmacheva |
| author_facet |
A. O. Kozak V. I. Ivashchenko O. K. Porada L. A. Ivashchenko O. K. Synelnychenko S. M. Dub O. S. Lytvyn I. I. Tymofieieva H. M. Tolmacheva |
| author_sort |
A. O. Kozak |
| title |
Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| title_short |
Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| title_full |
Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| title_fullStr |
Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| title_full_unstemmed |
Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| title_sort |
effect of the nitrogen flow on the properties of si–c–n amorphous thin films produced by magnetron sputtering |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000694123 |
| work_keys_str_mv |
AT aokozak effectofthenitrogenflowonthepropertiesofsicnamorphousthinfilmsproducedbymagnetronsputtering AT viivashchenko effectofthenitrogenflowonthepropertiesofsicnamorphousthinfilmsproducedbymagnetronsputtering AT okporada effectofthenitrogenflowonthepropertiesofsicnamorphousthinfilmsproducedbymagnetronsputtering AT laivashchenko effectofthenitrogenflowonthepropertiesofsicnamorphousthinfilmsproducedbymagnetronsputtering AT oksynelnychenko effectofthenitrogenflowonthepropertiesofsicnamorphousthinfilmsproducedbymagnetronsputtering AT smdub effectofthenitrogenflowonthepropertiesofsicnamorphousthinfilmsproducedbymagnetronsputtering AT oslytvyn effectofthenitrogenflowonthepropertiesofsicnamorphousthinfilmsproducedbymagnetronsputtering AT iitymofieieva effectofthenitrogenflowonthepropertiesofsicnamorphousthinfilmsproducedbymagnetronsputtering AT hmtolmacheva effectofthenitrogenflowonthepropertiesofsicnamorphousthinfilmsproducedbymagnetronsputtering |
| first_indexed |
2025-07-22T04:56:57Z |
| last_indexed |
2025-07-22T04:56:57Z |
| _version_ |
1838322347259461632 |