Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

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Bibliographic Details
Date:	2015
Main Authors:	A. P. Shapovalov, I. V. Korotash, E. M. Rudenko, F. F. Sizov, D. S. Dubyna, L. S. Osipov, Yu. Polotskiy, Z. F. Tsybrii, A. A. Korchovyi
Format:	Article
Language:	English
Published:	2015
Series:	Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000706494
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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