Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor
The features of the physical mechanisms of controlled ion-plasma formation of the new functional nanomaterials are investigated. The technological regimes of formation of functional nanostructured materials under combined impact of several plasma sources are investigated; the structural and electric...
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| Date: | 2015 |
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| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут металофізики ім. Г.В. Курдюмова НАН України
2015
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| Series: | Металлофизика и новейшие технологии |
| Subjects: | |
| Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/111893 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor / E. M. Rudenko, I. V. Korotash, D. Y. Polotskiy, L. S. Osipov, M. V. Dyakin, T. A. Prikhna, A. P. Shapovalov // Металлофизика и новейшие технологии. — 2015. — Т. 37, № 4. — С. 499-508. — Бібліогр.: 8 назв. — рос. |